TY  - JOUR
AU  - Yifu Ding
AU  - Hyun
AU  - Jing Zhou
AU  - Brian Okerberg
AU  - Jack Douglas
AU  - Alamgir Karim
AU  - Christopher Soles
C2  - Advanced Functional Materials
DA  - 2008-06-10
LA  - en
M1  - 18
PB  - Advanced Functional Materials
PY  - 2008
TI  - Nanoimprint Lithography and the Role of Viscoelasticity in the Generation of Residual Stress in Model Polystyrene Patterns
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854115
ER  -