TY  - JOUR
AU  - James E. Maslar
AU  - William A. Kimes
AU  - Vladimir B. Khromchenko
AU  - Brent Sperling
AU  - Ravindra Kanjolia
C2  - Journal of Crystal Growth
DA  - 2023-04-01 04:04:00
DO  - https://doi.org/10.1016/j.jcrysgro.2023.127102
LA  - en
M1  - 607
PB  - Journal of Crystal Growth
PY  - 2023
TI  - Comparison of saturator designs for low volatility liquid precursor delivery
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935461
ER  -