TY  - JOUR
AU  - Mark Sobolewski
C2  - Journal of Applied Physics
DA  - 2022-10-20 04:10:00
LA  - en
M1  - 132
PB  - Journal of Applied Physics
PY  - 2022
TI  - Response to "Comment on 'The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor' "
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935158
ER  -