TY  - JOUR
AU  - Mark Sobolewski
C2  - Plasma Sources Science & Technology
DA  - 2021-02-25 05:02:00
LA  - en
M1  - 30
PB  - Plasma Sources Science & Technology
PY  - 2021
TI  - In situ measurement of electron emission yield and elastic reflection coefficient at silicon dioxide surfaces exposed to argon plasmas
ER  -