TY  - CONF
AU  - James Maslar
AU  - Wilbur Hurst
AU  - Donald Burgess
AU  - William Kimes
AU  - Nhan Nguyen
AU  - Elizabeth Moore
AU  - Joseph Hodges
C2  - ECS Transactions, Volume 13, Issue 2, Phoenix, AZ
DA  - 2008-01-01
LA  - en
M1  - 13
PB  - ECS Transactions, Volume 13, Issue 2, Phoenix, AZ
PY  - 2008
TI  - In Situ Gas Phase Diagnostics for Hafnium Oxide Atomic Layer Deposition
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=832216
ER  -