TY  - JOUR
AU  - Chengqing Wang
AU  - Ronald Jones
AU  - Kwang-Woo Choi
AU  - Christopher Soles
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - James Clarke
AU  - John Villarrubia
AU  - Benjamin Bunday
C2  - SPIE Conference Proceedings
DA  - 2008-03-24
LA  - en
M1  - 6922
PB  - SPIE Conference Proceedings
PY  - 2008
TI  - Line Width Roughness and Cross Sectional Measurements of Sub-50 nm Structures with CD-SAXS and CD-SEM
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853580
ER  -