TY  - JOUR
AU  - Hyun
AU  - Hae-Jeong Lee
AU  - Eric Lin
AU  - Alamgir Karim
AU  - Daniel Hines
AU  - Do Yoon
AU  - Christopher Soles
C2  - SPIE
DA  - 2008-03-28
LA  - en
M1  - 6921
PB  - SPIE
PY  - 2008
TI  - Nanoimprint Lithography for the Direct Patterning of Nanoporous Interlayer Dielectric Insulator Materials
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852733
ER  -