TY  - JOUR
AU  - Chengqing Wang
AU  - Ronald Jones
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - Jim Leu
C2  - Applied Physics Letters
DA  - 2007-05-10
LA  - en
PB  - Applied Physics Letters
PY  - 2007
TI  - Small Angle X-Ray Scattering Measurements of Lithographic Patterns With Sidewall Roughness From Vertical Standing Waves
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852615
ER  -