TY  - JOUR
AU  - Christopher Soles
AU  - Richard Kasica
AU  - Hae-Jeong Lee
AU  - Jae Sim
AU  - Sung-Il Lee
AU  - Ki-Bum Kim
AU  - Hyun-Mi Kim
AU  - Do Yoon
C2  - Applied Organometallic Chemistry
DA  - 2013-02-28 05:02:00
DO  - https://doi.org/10.1002/aoc.2985
LA  - en
PB  - Applied Organometallic Chemistry
PY  - 2013
TI  - Organosilicate Polymer E-Beam Resists with High Resolution, Sensitivity and Stability
ER  -