TY  - JOUR
AU  - Hae-Jeong Lee
AU  - Christopher Soles
AU  - Hyun
AU  - Shuhui Kang
AU  - Eric Lin
AU  - Alamgir Karim
AU  - Wen-Li Wu
C2  - SPIE
DA  - 2008-03-28
LA  - en
M1  - 6922
PB  - SPIE
PY  - 2008
TI  - Characterizing Pattern Structures Using X-Ray Reflectivity
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852735
ER  -