TY  - VIDEO
AU  - Donald Windover
AU  - Victor Vartanian
AU  - Tom Kelly
AU  - Tom Larson
AU  - David Gil
C2  - SEMATECH Technology Transfer #11035149A-TR
DA  - 2011-07-22 04:07:00
LA  - en
PB  - SEMATECH Technology Transfer #11035149A-TR
PY  - 2011
TI  - Thickness and Composition Reference Standards for Semiconductor Metrology
ER  -