TY  - JOUR
AU  - Taekyung Kim
AU  - Eikhyun Cho
AU  - Yoon Sung Bae
AU  - Sang-Soo Choi
AU  - Bryan Barnes
AU  - Richard M. Silver
AU  - Martin Sohn
C2  - Optics and Lasers in Engineering
DA  - 2022-02-01 05:02:00
DO  - https://doi.org/10.1016/j.optlaseng.2022.106953
LA  - en
M1  - 152
PB  - Optics and Lasers in Engineering
PY  - 2022
TI  - Measurement sensitivity of DUV scatterfield microscopy parameterized with partial coherence for duty ratio-varied periodic nanofeatures
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=932950
ER  -