TY - JOUR AU - Jason Holm C2 - Electronic Device Failure Analysis DA - 2021-11-01 04:11:00 LA - en M1 - 4 PB - Electronic Device Failure Analysis PY - 2021 TI - A Brief Overview of Scanning Transmission Electron Microscopy in a Scanning Electron Microscope (STEM-in-SEM) UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=932860 ER -