TY  - CONF
AU  - Bryan Barnes
C2  - Modeling Aspects in Optical Metrology VIII, Munich, DE
DA  - 2021-09-15 04:09:00
DO  - https://doi.org/10.1117/12.2593306
LA  - en
M1  - 11783
PB  - Modeling Aspects in Optical Metrology VIII, Munich, DE
PY  - 2021
TI  - Optimizing Wavelengths for Optics-based Measurements of Advanced Electronics
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=932838
ER  -