TY  - CONF
AU  - Jabez McClelland
AU  - R Scholten
AU  - R Gupta
AU  - Robert Celotta
C2  - Proceedings of SPIE, Volume 2125, Photochemistry and Processing, Los Angeles, CA
DA  - 1994-01-01
LA  - en
M1  - 60
PB  - Proceedings of SPIE, Volume 2125, Photochemistry and Processing, Los Angeles, CA
PY  - 1994
TI  - Laser Focused Atomic Deposition
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620438
ER  -