TY - GEN AU - Christopher Evans AU - R Parks AU - L Shao AU - Angela Davies C2 - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD DA - 2000-12-01 LA - en PB - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD PY - 2000 TI - Interferometric Metrology of Photomask Blanks: Approaches Using 633 nm Wavelength Illumination ER -