TY  - GEN
AU  - Evans, Christopher
AU  - Parks, R
AU  - Shao, L
AU  - Davies, Angela
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2000-12-01
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2000
TI  - Interferometric Metrology of Photomask Blanks: Approaches Using 633 nm Wavelength Illumination
ER  -