TY  - CONF
AU  - Taekyung Kim
AU  - Jason J. Gorman
C2  - The 35th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022), Tokyo, JP
DA  - 2022-01-01 05:01:00
DO  - https://doi.org/10.1109/MEMS51670.2022.9699453 
LA  - en
PB  - The 35th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022), Tokyo, JP
PY  - 2022
TI  - A 3-DOF MEMS motion stage for scanning tunneling microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=933782
ER  -