TY  - JOUR
AU  - Kwanseob Park
AU  - Yoon Sung Bae
AU  - Sang-Soo Choi
AU  - Martin Sohn
C2  - APL Photonics
DA  - 2022-09-08 04:09:00
DO  - https://doi.org/10.1063/5.0102413
LA  - en
M1  - 7
PB  - APL Photonics
PY  - 2022
TI  - High numerical aperture reflective deep ultraviolet Fourier ptychographic microscopy for nanofeature imaging
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934871
ER  -