TY  - JOUR
AU  - Robert Cook
AU  - Brad Boyce
AU  - Lawrence Henry Friedman
AU  - Frank DelRio
C2  - Applied Physics Letters
DA  - 2021-05-17 04:05:00
DO  - https://doi.org/10.1063/5.0049521
LA  - en
M1  - 118
PB  - Applied Physics Letters
PY  - 2021
TI  - High-throughput bend-strengths of ultra-small polysilicon MEMS components
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=931889
ER  -