TY  - CONF
AU  - Ulf Griesmann
AU  - Tony Schmitz
AU  - Johannes Soons
C2  - ASPE Conference - Progress in Precision, Raleigh, NC
DA  - 2002-04-17
LA  - en
PB  - ASPE Conference - Progress in Precision, Raleigh, NC
PY  - 2002
TI  - New Optical Metrology at NIST for Semiconductor Lithography
ER  -