TY  - CONF
AU  - Ulf Griesmann
AU  - Nadia Machkour-Deshayes
AU  - Byoung Kim
AU  - Quandou Wang
AU  - Lahsen Assoufid
C2  - SPIE - Optics and Photonics, San Diego, CA
DA  - 2005-07-31
LA  - en
M1  - 5878
PB  - SPIE - Optics and Photonics, San Diego, CA
PY  - 2005
TI  - Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST
ER  -