TY  - CONF
AU  - James Gilsinn
AU  - Hui Zhou
AU  - Bradley Damazo
AU  - Joseph Fu
AU  - Richard Silver
C2  - Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Boston, MA
DA  - 2004-03-01
LA  - en
M1  - 3
PB  - Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Boston, MA
PY  - 2004
TI  - Nano-Lithography in Ultra-High Vacuum (UHV) for Real World Applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822172
ER  -