TY - JOUR AU - Robert Cook AU - Lawrence Henry Friedman C2 - Applied Physics Letters DA - 2018-12-07 05:12:00 DO - https://doi.org/10.1063/1.5055859 LA - en PB - Applied Physics Letters PY - 2018 TI - Weakly anisotropic residual contact stress in silicon demonstrated by electron backscatter diffraction and expanding cavity models ER -