TY  - JOUR
AU  - Christopher Szakal
AU  - Steven Hues
AU  - J Greg Gillen
AU  - Joe Bennett
C2  - The Journal of Physical Chemistry C
DA  - 2009-11-10 05:11:00
DO  - https://doi.org/10.1021/jp905019x
LA  - en
PB  - The Journal of Physical Chemistry C
PY  - 2009
TI  - Effect of Cluster Ion Analysis Fluence on Interface Quality in SIMS Molecular Depth Profiling
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901692
ER  -