TY  - SER
AU  - Daniel Wheeler
AU  - Jonathan E. Guyer
C2  - Book Chapter   Chapter in the book entitled Cu Interconnects for ULSI Technology, 
DA  - 2008-10-16 14:10:19
LA  - en
PB  - Book Chapter   Chapter in the book entitled Cu Interconnects for ULSI Technology, 
PY  - 2008
TI  - Modeling Superconformal Electrodeposition Using an Open Source PDE Solver
ER  -