TY  - JOUR
AU  - Mark Sobolewski
C2  - Conference Proceedings of the Society of Vacuum Coaters
DA  - 2008-10-16 14:10:10
LA  - en
PB  - Conference Proceedings of the Society of Vacuum Coaters
PY  - 2008
TI  - Real-Time Monitoring of Ion Energy and Ion Flux in Plasma Reactors Using RF Current and Voltage Measurements
ER  -