TY  - JOUR
AU  - Powell, Cedric
AU  - Werner, W
AU  - Smekal, W
C2  - Applied Physics Letters
DA  - 2008-10-16 14:10:10
LA  - en
PB  - Applied Physics Letters
PY  - 2008
TI  - Distinguishability of N Composition Profiles in SiON Films on Si by Angle-Resolved X-Ray Photoelectron Spectroscopy
ER  -