TY  - JOUR
AU  - Cedric Powell
AU  - W Werner
AU  - W Smekal
C2  - Applied Physics Letters
DA  - 2008-10-16 14:10:10
LA  - en
PB  - Applied Physics Letters
PY  - 2008
TI  - Distinguishability of N Composition Profiles in SiON Films on Si by Angle-Resolved X-Ray Photoelectron Spectroscopy
ER  -