TY  - JOUR
AU  - Russell, C
AU  - Owens, S
AU  - Diebold, A
AU  - Deslattes, R
C2  - Thin Solid Films
DA  - 2008-10-16 14:10:14
LA  - en
PB  - Thin Solid Films
PY  - 2008
TI  - Using Graying Incidence X-Ray Reflectivity to Characterize Thin Films for Semiconductor Applications
ER  -