TY  - JOUR
AU  - James Maslar
AU  - Wilbur Hurst
AU  - Donald Burgess
AU  - William Kimes
AU  - Nhan Nguyen
C2  - ECS Transactions
DA  - 2007-01-01
DO  - https://doi.org/10.1149/1.2408909
LA  - en
M1  - 2
PB  - ECS Transactions
PY  - 2007
TI  - In Situ Characterization of Gas-Phase Species Present During Hafnium Oxide Atomic Layer Deposition
ER  -