TY  - JOUR
AU  - John Burnett
AU  - Ulf Griesmann
AU  - R Gupta
AU  - T Jou
C2  - International Symposium on Microelectronics
DA  - 2008-10-16 14:10:14
LA  - en
PB  - International Symposium on Microelectronics
PY  - 2008
TI  - Index of Retraction and its Temperature Dependence of Calcium Fluoride Near 157nm
ER  -