TY  - JOUR
AU  - R Matyi
C2  - International Conference on Characterization and Metrology for ULSI Technology
DA  - 2008-10-16 14:10:14
LA  - en
PB  - International Conference on Characterization and Metrology for ULSI Technology
PY  - 2008
TI  - High Resolution X-ray Scattering Methods for ULSI Materials Characterization and Metrology for ULSI Technology
ER  -