TY  - JOUR
AU  - John T. Woodward IV
AU  - Harun Solak
C2  - Journal of Vacuum Science and Technology B
DA  - 2008-10-16 14:10:14
LA  - en
PB  - Journal of Vacuum Science and Technology B
PY  - 2008
TI  - Chemical Force Microscopy of 30 nm Half-Pitch Latent Images in Poly(Methyl-Methacrylate)
ER  -