TY  - JOUR
AU  - G Bano
AU  - K Rozsa
AU  - Alan Gallagher
C2  - Aip Conference Proceedings
DA  - 2008-10-16 14:10:14
LA  - en
PB  - Aip Conference Proceedings
PY  - 2008
TI  - uses of Small Particle Growth in Silane Discharges
ER  -