TY  - JOUR
AU  - Philip Pong
AU  - Moshe Schmoueli
AU  - William Egelhoff Jr.
C2  - SPIE
DA  - 2008-10-16 14:10:19
LA  - en
PB  - SPIE
PY  - 2008
TI  - Fabrication of Spintronic Devices - Etching Endpoint Detection by Resistance Measurement for Magnetic Tunnel Junctions
ER  -