TY - VIDEO AU - Barry Bauer AU - Hae-Jeong Lee AU - R Hedden AU - Da-Wei Liu AU - Wen-Li Wu C2 - Pore Size Distributions in Low-k Thin Films by X-Ray Reflectivity and Small Angle Neutron Scattering DA - 2008-10-16 14:10:19 LA - en PB - Pore Size Distributions in Low-k Thin Films by X-Ray Reflectivity and Small Angle Neutron Scattering PY - 2008 TI - Pore Size Distributions in Low-k Thin Films by X-Ray Reflectivity and Small Angle Neutron Scattering ER -