TY  - JOUR
AU  - Eric Lin
AU  - D Pochan
AU  - R Kolb
AU  - Wen-Li Wu
AU  - Sushil K. Satija
C2  - International Conference on Characterization and Metrology for ULSI Technology
DA  - 2008-10-16 14:10:19
LA  - en
PB  - International Conference on Characterization and Metrology for ULSI Technology
PY  - 2008
TI  - Neutron Reflectivity for Interfacial Materials Characterization
ER  -