TY  - GEN
AU  - Frank W. Gayle
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2008-10-16 14:10:19
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2008
TI  - FY 2001 Programs and Accomplishments - Materials for Microelectronics
ER  -