TY  - JOUR
AU  - Hae-Jeong Lee
AU  - Eric Lin
AU  - J Lan
AU  - Y Cheng
AU  - H Liou
AU  - Wen-Li Wu
AU  - Y Wang
AU  - M Feng
AU  - C Chao
C2  - Characterization and Metrology for ULSI Technology Conference
DA  - 2008-10-16 14:10:19
LA  - en
PB  - Characterization and Metrology for ULSI Technology Conference
PY  - 2008
TI  - Investigation of N<sub>2</sub> Plasma Effects on the Depth Profile of Hydrogen Silsesquioxane Thin Films Using High Resolution Specular X-Ray Reflectivity
ER  -