TY  - JOUR
AU  - David VanderHart
AU  - Vivek Prabhu
C2  - Chemistry of Materials
DA  - 2008-10-16 14:10:19
LA  - en
PB  - Chemistry of Materials
PY  - 2008
TI  - Photoacid Generator Dispersion in Partially Fluorinated Photoresist Polymers and their Blends
ER  -