TY  - JOUR
AU  - Wagner, M
AU  - Gillen, J Greg
C2  - Applied Surface Science
DA  - 2017-02-19 20:02:57
LA  - en
PB  - Applied Surface Science
PY  - 2017
TI  - Impact Energy Dependence of SF5+ Ion Beam Damage of Poly(Methyl Methacrylate) Studied by Time-of-Flight Secondary Ion Mass Spectrometry
ER  -