TY - JOUR AU - M Wagner AU - J Greg Gillen C2 - Applied Surface Science DA - 2017-02-19 20:02:57 LA - en PB - Applied Surface Science PY - 2017 TI - Impact Energy Dependence of SF5+ Ion Beam Damage of Poly(Methyl Methacrylate) Studied by Time-of-Flight Secondary Ion Mass Spectrometry ER -