TY  - JOUR
AU  - Andrew Madison
AU  - John S. Villarrubia
AU  - Kuo-Tang Liao
AU  - Craig R. Copeland
AU  - Joshua Schumacher
AU  - Kerry Siebein
AU  - Robert Ilic
AU  - James Alexander Liddle
AU  - Samuel M. Stavis
C2  - Advanced Functional Materials
DA  - 2022-08-21 04:08:00
DO  - https://doi.org/10.1002/adfm.202111840 
LA  - en
M1  - 32
PB  - Advanced Functional Materials
PY  - 2022
TI  - Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining
ER  -