TY - JOUR AU - James E. Maslar AU - William A. Kimes AU - Brent Sperling AU - Ravindra Kanjolia C2 - Applied Spectroscopy DA - 2020-08-24 04:08:00 DO - https://doi.org/10.1177/0003702819885182 LA - en M1 - 74 PB - Applied Spectroscopy PY - 2020 TI - Non-dispersive infrared gas analyzer for partial pressure measurements of a tantalum alkylamide during vapor deposition processes ER -