TY  - JOUR
AU  - James E. Maslar
AU  - William A. Kimes
AU  - Brent Sperling
AU  - Ravindra Kanjolia
C2  - Journal of Vacuum Science & Technology A
DA  - 2020-12-10 05:12:00
DO  - https://doi.org/10.1116/6.0000676
LA  - en
M1  - 39
PB  - Journal of Vacuum Science & Technology A
PY  - 2020
TI  - Characterization of vapor draw vessel performance for low-volatility solid precursor delivery
ER  -