TY  - CONF
AU  - Martinez, Joaquin
AU  - Obeng, Yaw
AU  - Knight, Stephen
C2  - FDP (Flat Panel Display) China 2009, Shanghai, CH
DA  - 2009-03-11
LA  - en
PB  - FDP (Flat Panel Display) China 2009, Shanghai, CH
PY  - 2009
TI  - Advanced Metrology for Nanoelectronics at the National Institute of Standards and Technology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901409
ER  -