TY - CONF AU - Joaquin Martinez AU - Yaw Obeng AU - Stephen Knight C2 - FDP (Flat Panel Display) China 2009, Shanghai, CH DA - 2009-03-11 LA - en PB - FDP (Flat Panel Display) China 2009, Shanghai, CH PY - 2009 TI - Advanced Metrology for Nanoelectronics at the National Institute of Standards and Technology UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901409 ER -