TY - CONF AU - Vikrant Gokhale AU - Jason Gorman C2 - IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, US DA - 2017-01-21 05:01:00 LA - en PB - IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, US PY - 2017 TI - Direct Measurement of Dissipation in Phononic Crystal and Straight Tethers for MEMS Resonators UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922234 ER -