TY  - CONF
AU  - Joshua Pomeroy
AU  - Kevin Dwyer
AU  - Ke Tang
AU  - Hyun Kim
AU  - Aruna Ramanayaka
AU  - David Simons
C2  - ISDRS 2016 PROCEEDINGS, Bethesda, MD, US
DA  - 2016-12-06 05:12:00
LA  - en
PB  - ISDRS 2016 PROCEEDINGS, Bethesda, MD, US
PY  - 2016
TI  - Enriching and purifying silicon epilayers for quantum information
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=922263
ER  -