TY  - CONF
AU  - Bryan Barnes
AU  - Mark-Alexander Henn
AU  - Hui Zhou
AU  - Martin Sohn
AU  - Richard Silver
C2  - 2017 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
DA  - 2017-03-19 04:03:00
LA  - en
PB  - 2017 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Monterey, CA, US
PY  - 2017
TI  - Assessing Quantitative Optical Imaging for Realizing In-die Critical Dimension Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923066
ER  -