TY  - CONF
AU  - Bryan Barnes
AU  - Hui Zhou
AU  - Mark-Alexander Henn
AU  - Martin Sohn
AU  - Richard Silver
C2  - Proceedings of the SPIE, Munich, DE
DA  - 2017-06-25 04:06:00
DO  - https://doi.org/10.1117/12.2271149
LA  - en
M1  - 10330
PB  - Proceedings of the SPIE, Munich, DE
PY  - 2017
TI  - Optimizing image-based patterned defect inspection through FDTD simulations at multiple ultraviolet wavelengths
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923390
ER  -