TY  - JOUR
AU  - Gheorghe Stan
AU  - Cristian Ciobanu
AU  - Igor Levin
AU  - Mark van
AU  - Alan Myers
AU  - Kanwal Singh
AU  - Christopher Jezewski
AU  - Barbara Miner
AU  - Sean King
C2  - Nano Letters
DA  - 2015-05-07
LA  - en
PB  - Nano Letters
PY  - 2015
TI  - Nanoscale buckling of ultrathin low-k dielectric lines during hard-mask patterning
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917567
ER  -