TY  - CONF
AU  - Thomas Michels
AU  - Vladimir Aksyuk
C2  - Proceedings, Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, US
DA  - 2016-06-04 04:06:00
LA  - en
PB  - Proceedings, Solid State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, SC, US
PY  - 2016
TI  - Cavity optical transducer platform with integrated actuation for multiple sensing applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920652
ER  -